Journal of Infrared and Millimeter Waves, Volume. 43, Issue 3, 305(2024)

Improved liquid phase epitaxy method for in-situ growth of HgCdTe with positive composition gradient

Qin HUO, Hong-Qiang HAN, Cheng ZHANG, Cui-Ling JIAO, Reng WANG, Cheng-Ming MAO, Ye LU, Xin-Tian CHEN, Hui QIAO*, and Xiang-Yang LI
Author Affiliations
  • Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
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    References(24)

    [1] Rogalski A. History of infrared detectors[J]. Opto-Electronics Review, 20, 279-308(2012).

    [2] Hu Wei-Da, Ye Zhen-Hua, Liao Lei et al. 128×128 long-wavelength/mid-wavelength two-color HgCdTe infrared focal plane array detector with ultralow spectral cross talk[J]. Optics Letters, 39, 5130-5133(2014).

    [3] Gravrand O, Destefanis G, Bisotto S et al. Issues in HgCdTe Research and Expected Progress in Infrared Detector Fabrication[J]. Journal of Electronic Materials, 42, 3349-3358(2013).

    [4] Wang Qing-Xue, Wei Yan-Feng, Yang Jian-Rong et al. Effect of LPE-HgCdTe composition on uniformity on infrared transmission spectra[J]. Journal of semiconductors., 26, 904-909(2005).

    [5] Hougen C A. Model for infrared absorption and transmission of liquid-phase epitaxy HgCdTe[J]. Journal of Applied Physics, 66, 3763-3766(1989).

    [6] Rosenfeld D, Garber V, Ariel V et al. Compositionally graded HgCdTe photodiodes: Prediction of spectral response from transmission spectrum and the impact of grading[J]. Journal of Electronic Materials, 24, 1321-1328(1995).

    [7] Yang Jian-Rong[M]. Physics and technology of HgCdTe materials(2012).

    [8] Singh A, Shukla A K, Pal R. Performance of Graded Band gap HgCdTe Avalanche Photodiode[J]. IEEE Trans. Electron Devices, 64, 1146-1152(2017).

    [9] Cui Bao-Shuang, Wei Yan-Feng, Sun Quan-Zhi et al. Effect of composition distribution in the HgCdTe film on spectral response of device[J]. J. Infrared Millim. Waves., 32, 225-230(2013).

    [10] Sang Mao-Sheng, Xu Guo-Qing, Qiao Hui et al. High speed uncooled MWIR infrared HgCdTe photodetector based on graded bandgap structure[J]. J. Infrared Millim. Waves., 41, 972-979(2022).

    [11] Xu Guo-Qing, Wang Reng, Chen Xin-Tian et al. Study on photoelectric characteristics of compositionally graded HgCdTe detector[J]. J. Infrared Millim. Waves, 42, 285-291(2023).

    [12] Lee D L. Modeling of optical response in graded absorber layer detectors[J]. Journal of Electronic Materials, 35, 1423-1428(2006).

    [13] Liu ling-Feng. Formation techniques of HgCdTe dual-band micro-mesa arrays[D](2020).

    [14] Hu Wei-Da, Chen Xiao-Shuang, Ye Zhen-Hua et al. A hybrid surface passivation on HgCdTe long wave infrared detector with in-situ CdTe deposition and high-density Hydrogen plasma modification[J]. Applied Physics Letters, 99, 091101(2011).

    [15] Bratt P R, Johnson S M, Rhiger D R et al. Historical perspectives on HgCdTe material and device development at Raytheon Vision Systems[J]. Proc. of SPIE, 7298, 1-35(2009).

    [16] Lovecchio P, Wong K, Parodos T et al. Advances in liquid phase epitaxial growth of Hg1-xCdxTe for SWIR through VLWIR photodiodes[J]. Proc. of SPIE, 5564, 65-72(2004).

    [17] Tian Zhen, Song Shu-Fang, Xing Yan-Lei et al. Research on preparation of very-long-wavelength infrared focal plane arrays[J]. Laser and Infrared., 52, 1527-1531(2022).

    [18] Pal R, Malik A, Srivastav V et al. Compositionally graded interface for passivation of HgCdTe photodiodes[J]. Journal of Electronic Materials, 35, 1793-1800(2006).

    [19] Wang Xi. Fabrication and characterization of 12.5 μm long wave infrared detector[D](2018).

    [20] Wermke A, Boeck T, Gbel T et al. Thermodynamic investigations on the liquid phase epitaxy of Hg1-xCdxTe layers[J]. Journal of Crystal Growth, 121, 571-578(1992).

    [21] Kong Jin-Chen, Song Lin-Wei, Qi Wen-Bin et al. Progress in LPE Growth of HgCdTe at Kunming Institute of Physics[J]. Infrared Technology, 45, 111-122(2023).

    [24] Fulk C, Parodos T, Lamarre P et al. Critical Thickness of Exponentially and Linearly Graded HgCdTe/CdZnTe[J]. Journal of Electronic Materials, 38, 1690-1697(2009).

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    Qin HUO, Hong-Qiang HAN, Cheng ZHANG, Cui-Ling JIAO, Reng WANG, Cheng-Ming MAO, Ye LU, Xin-Tian CHEN, Hui QIAO, Xiang-Yang LI. Improved liquid phase epitaxy method for in-situ growth of HgCdTe with positive composition gradient[J]. Journal of Infrared and Millimeter Waves, 2024, 43(3): 305

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    Paper Information

    Category: Research Articles

    Received: Jul. 31, 2023

    Accepted: --

    Published Online: Apr. 29, 2024

    The Author Email: Hui QIAO (qiaohui@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2024.03.003

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