Fig. 1. Precise tilt platform. (a) Structural diagram of platform, where (1) is transmission part, and (2) is cross-sectional view; (b) physical picture

Fig. 2. Diagrams of platform motion models. (a) Spatial motion state of platform; (b) relationship between PZT displacement and platform posture

Fig. 3. Schematic diagram of displacement measurement

Fig. 4. Schematic diagram of precise tilt platform control system

Fig. 5. Diagram of control system using precise tilt platform

Fig. 6. Comparison of open-loop control and closed-loop control

Fig. 7. Comparison of measurement results between PSD detection device and inclinometer

Fig. 8. Resolution statistics of closed-loop control