Chinese Journal of Lasers, Volume. 52, Issue 6, 0603101(2025)

Development of High‑Performance Quad‑Band Bandpass Filter for Fluorescence Detection

Xiaomin Lin*, Xianpeng Liang, Hongyu Huang, Chao Ban, Jing Ma, Jingwen Xu, and Xiaojun Yin
Author Affiliations
  • Shenyang Academy of Instrumentation Science Co., Ltd., Shenyang 110043, Liaoning , China
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    Figures & Tables(16)
    Schematics of detection light path. (a) Multi-channel detection; (b) multi-band detection
    Initial spectral curve of four-pass band designed by long and short wave pass method
    Four-pass band transmission curve designed by optimized long and short wave pass combination method
    Four-pass band cutoff spectral curve designed by optimized long and short wave pass combination method
    Transmittance curve of film system structure 1
    Transmittance curve of film system structure 2
    Origin spectral curve of designed quad-band bandpass film system structure
    Spectral curves of quad-band bandpass filter after optimization . (a) Transmittance spectrum; (b) cutoff background spectrum
    Simulated transmittance spectrum with average error of 0.2%
    Comparison between designed and measured spectra before optimization
    Sensitivity analysis results of primary quad-band bandpass layers
    Comparison between designed and measured transmittance curves after optimization
    Measured results of re-plated quad-band bandpass films after ion beam bombardment. (a) Transmittance spectrum; (b) optical density
    Temperature variation curve during high-low temperature cycle
    Environmental adaptability of quad-band bandpass filter. (a) Transmittance spectrum after high-low temperature experiment; (b) optical density after high-low temperature experiment; (c) physical picture of product after high-low temperature experiment; (d) surface morphology after environment experiment
    • Table 1. Optimal process parameters

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      Table 1. Optimal process parameters

      ParameterPVD1PVD2
      MaterialTaSi
      Argon flow /(cm3/min)3535
      Oxygen flow /(cm3/min)40‒5515‒20
      Power at medium frequency /W47004700
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    Xiaomin Lin, Xianpeng Liang, Hongyu Huang, Chao Ban, Jing Ma, Jingwen Xu, Xiaojun Yin. Development of High‑Performance Quad‑Band Bandpass Filter for Fluorescence Detection[J]. Chinese Journal of Lasers, 2025, 52(6): 0603101

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    Paper Information

    Category: Thin Films

    Received: Aug. 15, 2024

    Accepted: Oct. 6, 2024

    Published Online: Mar. 18, 2025

    The Author Email: Xiaomin Lin (linxiaomin@hb-optical.com.cn)

    DOI:10.3788/CJL241145

    CSTR:32183.14.CJL241145

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