Fig. 1. Schematic diagram of fiber-optic FP pressure sensor

Fig. 2. Three-dimensional diagram of diaphragm deformation distribution

Fig. 3. Relationship between diaphragm center deformation and effective radius at different diaphragm thicknesses

Fig. 4. Three-dimensional diagram of the pressure sensitive structure model under pressure

Fig. 5. Deformation varying with pressure for pressure-sensitive structural model

Fig. 6. Flow chart of sensor head production process

Fig. 7. Single sensor head

Fig. 8. Physical photograph of the sensor

Fig. 9. Pressure testing system

Fig. 10. Reflection spectrum of the sensor

Fig. 11. Experimental results of relationship between the cavity length and pressure

Fig. 12. Repeatability and stability of the sensor