Chinese Optics, Volume. 17, Issue 4, 771(2024)
MEMS silicon-glass fiber-optic FP pressure sensor for high-pressure measurements
We investigate a silicon-glass fiber-optic Fabry-Perot (FP) pressure sensor based on Micro-Electro-Mechanical Systems (MEMS) technology for high-pressure measurements. Silicon material was used as the sensitive element, and the Inductively Coupled Plasma (ICP) dry-etched monocrystalline silicon diaphragm was anode bonded with a high borosilicate glass to form the FP cavity. The sensor head was manufactured in batches utilizing MEMS technology, which is structurally stable, strongly resistant to overload, and not prone to fail in high-pressure environments. The experimental results show that the sensor can acheive high-pressure measurements up to 30 MPa with a sensitivity of 46.94 nm/MPa and a linearity of 0.99897, with high consistency and reliable measurement results. The designed pressure sensor has strong application prospects in high-pressure sensing.
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Yu-wei FU, Rui-nan WANG, Wen-ting TANG, Xi-zhao DU, Wei WANG, Hai-bin CHEN. MEMS silicon-glass fiber-optic FP pressure sensor for high-pressure measurements[J]. Chinese Optics, 2024, 17(4): 771
Received: Dec. 18, 2023
Accepted: Apr. 15, 2024
Published Online: Aug. 9, 2024
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