Infrared and Laser Engineering, Volume. 44, Issue 3, 959(2015)
Crystallization of amorphous Si films by excimer laser annealing
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Qin Juanjuan, Shao Jingzhen, Liu Fengjuan, Fang Xiaodong. Crystallization of amorphous Si films by excimer laser annealing[J]. Infrared and Laser Engineering, 2015, 44(3): 959
Paper Information
Category: 光电器件与材料
Received: Jul. 8, 2014
Accepted: Aug. 12, 2014
Published Online: Jan. 26, 2016
The Author Email: Juanjuan Qin (tiancaijuanjuan@126.com)
CSTR:32186.14.
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