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Laser & Optoelectronics Progress, Volume. 60, Issue 15, 1500003(2023)

Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication

Zihao Yu1,2, Lihao Wang1, Yang Wang1, Yichen Liu1, and Zhenyu Wu1,2,3,4、*
Author Affiliations
  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Shanghai Industrial μTechnology Research Institute, Shanghai 201800, China
  • 4School of Microelectronics, Shanghai University, Shanghai 200444, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (18)
    Equations (2)
    References (38)
    Cited By (7)
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    Paper Information
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    Figures & Tables(18)
    Structure diagram of fast steering mirror (FSM)

    Fig. 1. Structure diagram of fast steering mirror (FSM)

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    Structure diagram of high-bandwidth two-axis steering mirror (HBSM)[25]

    Fig. 2. Structure diagram of high-bandwidth two-axis steering mirror (HBSM)[25]

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    Physical diagram of TNO FSM[26]

    Fig. 3. Physical diagram of TNO FSM[26]

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    Structure diagram of V-931.01[28]

    Fig. 4. Structure diagram of V-931.01[28]

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    Structure diagram of simulation control FSM[29]

    Fig. 5. Structure diagram of simulation control FSM[29]

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    PAM30 piezoelectric FSM's platform[30]

    Fig. 6. PAM30 piezoelectric FSM's platform[30]

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    S3 series piezoelectric pendulum[31]

    Fig. 7. S3 series piezoelectric pendulum[31]

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    FSM structural model (left) and physical diagram (right) [32]

    Fig. 8. FSM structural model (left) and physical diagram (right) [32]

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    FSM system model (left) and physical diagram (right) [33]

    Fig. 9. FSM system model (left) and physical diagram (right) [33]

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    Deflection geometric graph (left)［34］ and structure diagram (right)［35］ of FSM

    Fig. 10. Deflection geometric graph (left)［34］ and structure diagram (right)［35］ of FSM

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    Structure diagram of S34.T2S

    Fig. 11. Structure diagram of S34.T2S

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    Structure diagram of A8L2.2[38]

    Fig. 12. Structure diagram of A8L2.2[38]

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    Laser communication systems of Stanford University (left) and Massachusetts Institute of Technology (right) [23]

    Fig. 13. Laser communication systems of Stanford University (left) and Massachusetts Institute of Technology (right) [23]

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    Structure diagram of S12237-03P[22]

    Fig. 14. Structure diagram of S12237-03P[22]

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    Laser communication system of LaSEINE lab[22]

    Fig. 15. Laser communication system of LaSEINE lab[22]

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    Photo of MEMS FSM test board (left) and scan curves in helix shape (right)

    Fig. 16. Photo of MEMS FSM test board (left) and scan curves in helix shape (right)

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    Geometric relationship between FSM and beam when FSM rotates around a single axis

    Fig. 17. Geometric relationship between FSM and beam when FSM rotates around a single axis

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    • Table 1. Summary of FSMs' parameters

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      Table 1. Summary of FSMs' parameters

      Company or research institutionDrive modeMirror diameter /mmAngle rangeClosed loop bandwidth /Hz
      Lincoln Laboratory of Massachusetts Institute of TechnologyVoice coil motor20±10 mrad104
      TNOVoice coil motor20±2°103
      Physik InstrumenteVoice coil motor25.4±35 mrad75
      Beihang UniversityVoice coil motor80±873 μrad—
      Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of SciencesVoice coil motor50.8±26 mrad300
      CEDRATPiezoelectric ceramics27

      x axis ±2.1 mrad，

      y axis ±1.5 mrad

      		—
      Physik InstrumentePiezoelectric ceramics<19±2 mrad300
      Xi’an Jiaotong UniversityPiezoelectric ceramics20±52 mrad—
      Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of SciencesPiezoelectric ceramics100±5 mrad300
      Shanghai Institute of Technical Physics，Chinese Academy of SciencesPiezoelectric ceramics

      Major axis 280，

      minor axis 90 elliptical

      Major axis ±3 mrad，

      minor axis ±2.1 mrad

      		149
      Harbin Core Tomorrow Science & TechnologyPiezoelectric ceramics25±1.25 mrad250
      Mirrorcle TechnologiesMEMS2.4±100 mrad—
      HamamatsuMEMS2.6±15°100
      Shanghai Institute of Microsystem and Information Technology，Chinese Academy of SciencesMEMS10±1.7 mrad500
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    Zihao Yu, Lihao Wang, Yang Wang, Yichen Liu, Zhenyu Wu. Research Progress and Development Trend of Fast Steering Mirror for Satellite Laser Communication[J]. Laser & Optoelectronics Progress, 2023, 60(15): 1500003

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    Paper Information

    Category: Reviews

    Received: May. 16, 2022

    Accepted: Jul. 20, 2022

    Published Online: Aug. 11, 2023

    The Author Email: Zhenyu Wu (zhenyu.wu@mail.sim.ac.cn)

    DOI:10.3788/LOP221610

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology