Fig. 1. Schematic diagram of perpendicularity measurement method

Fig. 2. Schematic diagram of perpendicularity error fitting

Fig. 3. Schematic diagram of penta prism beamsplitter

Fig. 4. Schematic diagram of optical path for perpendicularity measurement devices

Fig. 5. Schematic diagram of the perpendicularity measurement device structure

Fig. 6. Photo of perpendicularity measurement comparison experiment devices