Laser & Optoelectronics Progress, Volume. 55, Issue 1, 11201(2018)
Two-Step Calibration of Probe Tip Center of Planar Target
Fig. 3. Simulation results of coordinate T'x and T'y of probe tip center before and after calibration. (a) T'x; (b) T'y
Fig. 6. Relationship between coordinate T″y of probe tip center and angle tilt β of target
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Zheng Xingchun, Zhao Min, Feng Shaohua. Two-Step Calibration of Probe Tip Center of Planar Target[J]. Laser & Optoelectronics Progress, 2018, 55(1): 11201
Category: Instrumentation, Measurement and Metrology
Received: Aug. 1, 2017
Accepted: --
Published Online: Sep. 10, 2018
The Author Email: Zhao Min (zhaomin1973@xaut.edu.cn)