Journal of Infrared and Millimeter Waves, Volume. 39, Issue 3, 273(2020)
Compact on-chip structured illumination system based on integrated optics
Fig. 1. The sketch of on-chip optics. GC is grating coupler; BPS is beam power splitter and BM is beam modulator including intensity and phase modulator.
Fig. 2. The Schematic diagram of splitters (a)1*2 and 1*3 MMI and(b) 1*2 and 1*3 ADC
Fig. 3. The FDTD simulation of interference pattern of two beams at the wavelength of 1550 nm. The distance between the two grating is about 200 μm (a) The sketch of GC structure where θ is the output angle,(b) Intensity distribution of beam coupled out from GC,(c) The sketch of interfering process,(d) The distribution of light intensity above the chip,(e) and (f) The distribution of light intensity at the height of 400 and 500 μm upon the chip
Fig. 4. (a) The microscope photograph of the integrated chip on PCB. Gold wires link the chip circuit and the external circuit,(b) Inclined surface fiber is packaged to the chip using UV adhesives,(c) and (d) Scanning electron microscope (SEM) photographs of the integrated chip
Fig. 5. The experiment setup used for SIM imaging. (a) The stretch of the experiment setup; (b) The experiment setup on the optical platform.
Fig. 6. Photographs from the CCD camera show the interference patterns at different positions.(a) and (c) Beam spot above the chip along two orthogonal directions,(b) and (d) Interference patterns of two orthogonal directions at the height of 500μm above the chip,(e) Three images with same output gratings but different phase steps
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Chen WANG, Yu-De YU, Fang LI, Zhi-Yong LI. Compact on-chip structured illumination system based on integrated optics[J]. Journal of Infrared and Millimeter Waves, 2020, 39(3): 273
Category: Materials and Devices
Received: Oct. 29, 2019
Accepted: --
Published Online: Jul. 7, 2020
The Author Email: Fang LI (lifang@semi.ac.cn)