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Spectroscopy and Spectral Analysis, Volume. 37, Issue 6, 1946(2017)

Movable GaN Membrane Micro-Grating on Patterned SOI Substrate Deposited with Molecular Beam Epitaxy

L Fan-min1、*, LI Pei2, WANG Yong-jin3, HU Fang-ren1,3, and ZHU Wen-zhen1
Author Affiliations
  • 1[in Chinese]
  • 2Department of Microsystems Engineering—IMTEK, University of Freiburg, 79110 Freiburg, Germany
  • 3[in Chinese]
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    L Fan-min, LI Pei, WANG Yong-jin, HU Fang-ren, ZHU Wen-zhen. Movable GaN Membrane Micro-Grating on Patterned SOI Substrate Deposited with Molecular Beam Epitaxy[J]. Spectroscopy and Spectral Analysis, 2017, 37(6): 1946

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    Paper Information

    Received: Nov. 26, 2015

    Accepted: --

    Published Online: Jul. 10, 2017

    The Author Email: L Fan-min (lfm15951900071@163.com)

    DOI:103964/jissn1000-0593(2017)06-1946-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology