Fig. 1. Schematic diagram of the boundary contour of BAD. (a) Cardioid BAD; (b) hexadecagonal BAD

Fig. 2. Propagation properties of the Bessel beams transmitting through the cardioid BAD, the hexadecagonal BAD, and the circular BAD. (a)(e)(i) Amplitude transmission coefficient distributions (ATCDs) of the cardioid BAD, the hexadecagonal BAD, and the circular BAD, respectively; (b)(f)(g) axial intensity distributions (AIDs) of the Bessel beams transmitting through the cardioid BAD, the hexadecagonal BAD, and the circular BAD, respectively [inset: relative deviations of the axial intensity (RDAI)]; (c)(g)(k) transverse intensity distributions (TIDs) of the Bessel beams in the cross-sectional plane located at z'=7m behind the above three BADs; (d)(h)(l) correspond to the relative deviations of the transverse intensity (RDTI) in Figs. 2(c), (g), and (k), respectively

Fig. 3. Axial propagation properties of the Bessel beams when the random amplitude deviation of the incident beam is ± 20%. (a)(c) ATCDs of the cardioid BAD and the hexadecagonal BAD, respectively; (b)(d) AIDs of the Bessel beams transmitting through the cardioid BAD and the hexadecagonal BAD, respectively (inset: corresponding RDAI)

Fig. 4. Transverse intensity distribution properties of the Bessel beams when the incident light has a random amplitude deviation. (a)(d) TIDs of the Bessel beams in the cross-sectional plane located at z'=7m behind the cardioid BAD and the hexadecagonal BAD, respectively; (b)(e) corresponding RDTI; (c)(f) maximum absolute value of the RDTI (simplified as the maximum relative deviation of transverse intensity, or the MRDTI) versus the axial propagation distance under the condition that the incident light has different random amplitude deviations

Fig. 5. Axial propagation properties of the elliptical Bessel beams when the ellipticity of the incident light spot is 1.5. (a)(c) Actual transparent districts of the cardioid BAD and the hexadecagonal BAD, respectively; (b)(d) AIDs of the elliptical Bessel beams transmitting through the cardioid BAD and the hexadecagonal BAD, respectively (inset: corresponding RDAI)

Fig. 6. Transverse intensity properties of the propagation Bessel beams when the incident light spot is elliptical. (a)(d) TIDs of the Bessel beams in the cross-sectional plane located at z'=7m behind the cardioid BAD and the hexadecagonal BAD, respectively, when the ellipticity of the incident light spot is 1.5; (b)(e) corresponding RDTI in the cross-sectional planes of Figs. 6(a) and (d), respectively; (c)(f) variation rule of the MRDTI versus the axial propagation distance when the incident light spot has different ellipticities, corresponding to the cardioid BAD and the hexadecagonal BAD, respectively

Fig. 7. Axial transmission characteristics of the Bessel beam, when the alignment deviation of the incident spot center is 0.5 mm. (a)(b) AIDs of the Bessel beams transmitting throught the cardioid BAD and the hexadecagonal BAD, respectively (inset: corresponding RDAI)

Fig. 8. Transverse intensity transmission characteristics of Bessel beams when the incident light spot center has an alignment deviation. (a)(d) TIDs of the Bessel beams in the cross-sectional plane located at z'=7m behind the cardioid BAD and the hexadecagonal BAD, respectively, when the alignment deviation of the incident spot center is 0.5 mm; (b)(e) RDTI in cross-sectional planes corresponding to Figs. 8(a) and (d), respectively; (c)(f) variation rule of the MRDTI versus the axial propagation distance when the incident light spot center has different alignment deviations, corresponding to the cardioid BAD and the hexadecagonal BAD, respectively

Fig. 9. Propagation properties of the Bessel beams when both BADs have different pixel pitches in micro photolithography. (a)(b) RDAI of the Bessel beams transmitting through the cardioid BAD and the hexadecagonal BAD, respectively; (c)(d) variation rule of the MRDTI versus the axial propagation distance when both BADs have different pixel pitches, corresponding to the cardioid BAD and the hexadecagonal BAD, respectively