Opto-Electronic Engineering, Volume. 46, Issue 5, 180444(2019)
The improvement of TFT lithography plane compensation
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Zhang Yuhu, Xu Haitao, Li Yawen, Luo Chuanwen, Cao Shaobo, Li Li. The improvement of TFT lithography plane compensation[J]. Opto-Electronic Engineering, 2019, 46(5): 180444
Paper Information
Category: Article
Received: Aug. 24, 2018
Accepted: --
Published Online: Jul. 25, 2019
The Author Email: Yuhu Zhang (zhangyuhu@boe.com.cn)
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