Journal of Synthetic Crystals, Volume. 54, Issue 3, 414(2025)

Dislocation Defects and Their Distribution Characteristics in Ga2O3 Crystal Grown by Edge-Defined Film-Fed Growth Method

YANG Wenjuan1,2, BU Yuzhe1,2, SAI Qinglin1、*, and QI Hongji1,3
Author Affiliations
  • 1Research Center of Laser Crystal, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 2Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Hangzhou Institute of Optics and Fine Mechanics, Hangzhou 311421, China
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    β-Ga2O3, as a new generation of ultra-wide bandgap semiconductor material, has garnered increasing attention due to its exceptional physical properties and high performance in devices. Various melt crystal growth techniques, such as the floating zone method and edge-defined film-fed growth (EFG) method, can be employed for the preparation of β-Ga2O3. Defects often exert significant adverse effects on the performance of semiconductor devices (e.g., higher leakage currents and lower breakdown voltages), making defect detection techniques for β-Ga2O3 crystals particularly crucial, especially for dislocation defects within linear defects. Traditionally, etching methods were used for the detection and density calculation of dislocations, but common methods for characterizing material defects are destructive and only applicable to the research analysis of experimental samples. In this paper, X-ray topography (XRT) and acid etching were utilized to investigate β-Ga2O3 grown by EFG method on (001), (010), and (100) surface, demonstrating the three-dimensional distribution characteristics of dislocations. It is shown that dislocations along the b-axis [010] direction dominate, providing valuable insights into the structure and characteristics of β-Ga2O3 dislocations. This, in turn, offers new directions for the subsequent selection of epitaxial and device crystal orientations.

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    YANG Wenjuan, BU Yuzhe, SAI Qinglin, QI Hongji. Dislocation Defects and Their Distribution Characteristics in Ga2O3 Crystal Grown by Edge-Defined Film-Fed Growth Method[J]. Journal of Synthetic Crystals, 2025, 54(3): 414

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    Paper Information

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    Received: Nov. 30, 2024

    Accepted: Apr. 23, 2025

    Published Online: Apr. 23, 2025

    The Author Email: SAI Qinglin (saiql@siom.ac.cn)

    DOI:10.16553/j.cnki.issn1000-985x.2024.0304

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