Chinese Journal of Lasers, Volume. 35, Issue s2, 215(2008)
Calibration of the Frequency-response Function for Interferometer Based on Step-Phase Comparing Method
[2] [2] Erik Novak, Chiayu Ai, James C. Wyant. Optical resolutions of phase measurements of laser Fizeau interferometer[J]. SPIE, 1996, 2870: 545~552
[4] [4] E. Novak, Chiayu Ai. Transfer function characterization of laser Fizeau interferometer for high spatial frequency phase measurements[J]. SPIE, 1997, 3134: 114~121
[5] [5] Wolfe C R, Downie J D, Lawson J K. Measuring the spatial frequency transfer function of phase-measuring interferometers for laser optics[J]. SPIE, 1996, 2870: 553~557
[6] [6] J. M. Eison, J .M. Bennett, Calculation of the power spectral density from surface profile data[J]. Appl. Opt., 1995, 34(1): 201~208
[7] [7] Geng Yan, Chai liqun, Xu Qiao. Measurement of the system transfer function of the interferometer and the analyses of the influence on the measuring[J]. Optical Technique, 2006, 32(5): 741~743
[8] [8] Lawson J K, Aikens D M , English R E et al.. Power spectral density specification for high- power laser systems [C]. SPIE, 1996, 2775: 345~356
[9] [9] Takacs P Z, Li M X, Furenlid Karen et al.. A step-height standard for surface profiler calibration [C]. SPIE, 1993, 1995: 235~244
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Wu Xuhua, Chen Lei, Chang Jianhua. Calibration of the Frequency-response Function for Interferometer Based on Step-Phase Comparing Method[J]. Chinese Journal of Lasers, 2008, 35(s2): 215