Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

Mai Wang; Lu Qi; Haohua Wang; Ziliang Ruan; Gengxin Chen; Bin Chen; Shengqi Gong; Kaixuan Chen; Liu Liu

doi:10.3788/COL202422.050601

Chinese Optics Letters, Volume. 22, Issue 5, 050601(2024)

Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

Mai Wang¹, Lu Qi^2,3, Haohua Wang^2,3, Ziliang Ruan¹, Gengxin Chen¹, Bin Chen¹, Shengqi Gong¹, Kaixuan Chen^2,3, and Liu Liu^1,4、*

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Hangzhou 310058, China

²Guangdong Provincial Key Laboratory of Optical Information Materials and Technology, South China Academy of Advanced Optoelectronics, South China Normal University, Higher-Education Mega-Center, Guangzhou 510006, China

³National Center for International Research on Green Optoelectronics, South China Normal University, Guangzhou 510006, China

⁴Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, China

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Mai Wang, Lu Qi, Haohua Wang, Ziliang Ruan, Gengxin Chen, Bin Chen, Shengqi Gong, Kaixuan Chen, Liu Liu, "Robust thin-film lithium niobate modulator on a silicon substrate with backside holes," Chin. Opt. Lett. 22, 050601 (2024)

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