INFRARED, Volume. 46, Issue 7, 26(2025)

Study on the Mesa Forming Quality of InAs/GaSb Type-II Superlattice Infrared Detector

Xiao-qian WANG, Ming LIU, Yu-peng NI, Jing-feng LI, and Ang REN
Author Affiliations
  • The 11th Research Institute of China Electronics Technology Group Corporation, Beijing 100015, China
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    References(6)

    [1] [1] Rogalski A. Recent progress in infrared detector technologies[J].Infrared Physics & Technology, 2011,54(3): 136-154.

    [2] [2] Osbourn G, Dawson L, Biefeld R, et al. III-V strained layer superlattices for long-wavelength detector applications: Recent progress[J].Journal of Vacuum Science & Technology A, 1987,5(5): 3150-3156.

    [3] [3] Rogalski A, Kopytko M, Martyniuk P. InAs/GaSb type-II superlattice infrared detectors: Three decades of development[C].SPIE, 2017,10177: 1017715.

    [4] [4] Rogalski A, Martyniuk P, Kopytko M, et al. Type-II superlattice photodetectors versus HgCdTe photodiodes[J].Progress in Quantum Electronics, 2019,68: 100228-100236.

    [5] [5] Kinch M A. Fundamentals of Infrared Detector Materials[M]. Bellingham: SPIE Press, 2007.

    [6] [6] Sidor D E, Savich G R, Wicks G W. Surface Leakage Mechanisms in III-V Infrared Barrier Detectors[J].Journal of Electronic Materials, 2016,45(9): 4663-4667.

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    WANG Xiao-qian, LIU Ming, NI Yu-peng, LI Jing-feng, REN Ang. Study on the Mesa Forming Quality of InAs/GaSb Type-II Superlattice Infrared Detector[J]. INFRARED, 2025, 46(7): 26

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    Paper Information

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    Received: Nov. 20, 2024

    Accepted: Aug. 12, 2025

    Published Online: Aug. 12, 2025

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2025.07.004

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