INFRARED, Volume. 45, Issue 6, 16(2024)
Research Progress on the Preparation of SiO2 Thin Films Based on PECVD
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LI Mu-ze, Hao Yong-qin. Research Progress on the Preparation of SiO2 Thin Films Based on PECVD[J]. INFRARED, 2024, 45(6): 16
Paper Information
Received: Jan. 17, 2024
Accepted: --
Published Online: Sep. 29, 2024
The Author Email: Yong-qin Hao (hyq72081220@aliyun.com)
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