Opto-heterodvne measurement or rousrhness of supersmooth surraces

Chinese Journal of Lasers, Volume. 16, Issue 8, 479(1989)

Lin Yao, Zhou Zhiyao, and Wang Runwen

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[in Chinese]

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References(3)

[1] [1] J. Zavislan, Laser Focus,21 (9), 82(1985)

[3] [3] J. M. Bennett, Appl. Opt., 15(11), 2705(1976)

[4] [4] J. Μ. Bennett. Appl. Opt., 20(10) 1785(1981)

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Lin Yao, Zhou Zhiyao, Wang Runwen. Opto-heterodvne measurement or rousrhness of supersmooth surraces[J]. Chinese Journal of Lasers, 1989, 16(8): 479

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Paper Information

Category: laser manufacturing

Received: Jan. 4, 1988

Accepted: --

Published Online: Aug. 13, 2012

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