Fig. 1. Structural of the F-P interferometric fiber optic microphone

Fig. 2. Principle of intensity demodulation method for the fiber optic microphone

Fig. 3. Structural diagram of the corrugated diaphragm

Fig. 4. Structural of the MEMS corrugated diaphragm. (a) Top wiew; (b) bottom view

Fig. 5. Influence of the distance between the corrugation and center on the diaphragm characteristics

Fig. 6. Influence of corrugation structural parameters on the diaphragm characteristics. (a) Distance between two corrugations; (b) corrugation width; (c) corrugation depth

Fig. 7. Influence of temperature stress on the resonant frequency

Fig. 8. Process flow of the corrugated diaphragm

Fig. 9. Physical image of the MEMS corrugated diaphragm

Fig. 10. Physical image of the F-P interferometric fiber optic microphone

Fig. 11. Performance test system of the fiber optic microphone

Fig. 12. Test results of fiber optic microphone based on MEMS corrugated diaphragm. (a) 250 Hz; (b) 500 Hz; (c) 1000 Hz; (d) 2000 Hz

Fig. 13. Test results of fiber optic microphone for different acoustic pressure

Fig. 14. Frequency response of fiber optic microphone with MEMS corrugated diaphragm