Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712001(2024)

White-Light Interferometry for Measuring Surface Topography of Capsule Based on Spherical Compensation and Optical-Path Matching

Yang Liu, Renhui Guo*, Jinwei Jiang, Yu Qian, Liang Xue, and Jianxin Li
Author Affiliations
  • School of Electronic and Optical Engineering, Nanjing University of Science & Technology, Nanjing 210094, Jiangsu, China
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    References(33)

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    [16] Ma J, Chun Q L, Li J X et al. A method for measuring surface defects in microspheres[P].

    [22] Deng L J. White light interferometry measurement system and algorithm[D](2015).

    [25] Ai C, Novak E L. Centroid approach for estimating modulation peak in broad-bandwidth interferometry[P].

    [33] Gao Z S, Shi S F. A rapid and effective microstructural optical inspection method for indentification and elimination of batwing effects[P].

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    Yang Liu, Renhui Guo, Jinwei Jiang, Yu Qian, Liang Xue, Jianxin Li. White-Light Interferometry for Measuring Surface Topography of Capsule Based on Spherical Compensation and Optical-Path Matching[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712001

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 18, 2023

    Accepted: Dec. 18, 2023

    Published Online: Aug. 30, 2024

    The Author Email: Renhui Guo (grh@njust.edu.cn)

    DOI:10.3788/LOP232325

    CSTR:32186.14.LOP232325

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