Laser & Optoelectronics Progress, Volume. 61, Issue 17, 1712001(2024)
White-Light Interferometry for Measuring Surface Topography of Capsule Based on Spherical Compensation and Optical-Path Matching
[3] Gao D Z, Wang M D, Liu Y Q et al. Measurement of target surface roughness with 4π turning technology of AFM[J]. High Power Laser and ParticleBeams, 11, 321-324(1999).
[16] Ma J, Chun Q L, Li J X et al. A method for measuring surface defects in microspheres[P].
[22] Deng L J. White light interferometry measurement system and algorithm[D](2015).
[25] Ai C, Novak E L. Centroid approach for estimating modulation peak in broad-bandwidth interferometry[P].
[33] Gao Z S, Shi S F. A rapid and effective microstructural optical inspection method for indentification and elimination of batwing effects[P].
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Yang Liu, Renhui Guo, Jinwei Jiang, Yu Qian, Liang Xue, Jianxin Li. White-Light Interferometry for Measuring Surface Topography of Capsule Based on Spherical Compensation and Optical-Path Matching[J]. Laser & Optoelectronics Progress, 2024, 61(17): 1712001
Category: Instrumentation, Measurement and Metrology
Received: Oct. 18, 2023
Accepted: Dec. 18, 2023
Published Online: Aug. 30, 2024
The Author Email: Renhui Guo (grh@njust.edu.cn)
CSTR:32186.14.LOP232325