Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Acta Optica Sinica, Volume. 39, Issue 11, 1124002(2019)

Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging

Ruxue Wei1,3, Yanwei Wang2,4, Liwen Jiang1, Xuqing Sun1, Hongyao Liu1, Chang Wang1,3, Xinchao Lu1、*, Weier Lu2,5,6、**, Yang Xia2,5,6, and Chengjun Huang1
Author Affiliations
  • 1Health Electronics Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 2Microelectronic Instrument and Equipment Center, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4Beijing Jiaotong University, Beijing 100044, China
  • 5Beijing Research Center of Engineering and Technology of Instrument and Equipment for Microelectronics Fabrication, Beijing 100029, China
  • 6Beijing Key Laboratory of Integrated Circuit Test Technology, Beijing 100088, China
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (8)
    Equations (0)
    References (22)
    Cited By (5)
    Tools
    Paper Information
    Topics
    Figures & Tables(8)
    Surface detection of transferred graphene. (a) Dark-field microscopy; (b) SEM

    Fig. 1. Surface detection of transferred graphene. (a) Dark-field microscopy; (b) SEM

    Download full size
    Schematic of optical path of SPP microscopic imaging

    Fig. 2. Schematic of optical path of SPP microscopic imaging

    Download full size
    Principle of graphene detection by SPP. (a) Schematic of SPP excited by Kretschmann configuration; (b) change of reflectance introduced by refractive index of graphene at interface; (c) change of SPP field distribution on interface induced by defects (dot: defect; straight line: incident SPP; dashed line: scattered SPP)

    Fig. 3. Principle of graphene detection by SPP. (a) Schematic of SPP excited by Kretschmann configuration; (b) change of reflectance introduced by refractive index of graphene at interface; (c) change of SPP field distribution on interface induced by defects (dot: defect; straight line: incident SPP; dashed line: scattered SPP)

    Download full size
    SPP imaging of different graphene edges and propagation direction of SPP is shown as arrow

    Fig. 4. SPP imaging of different graphene edges and propagation direction of SPP is shown as arrow

    Download full size
    Internal imaging of graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Fig. 5. Internal imaging of graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Download full size
    Imaging of wrinkles and break on edge of transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Fig. 6. Imaging of wrinkles and break on edge of transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Download full size
    Imaging of impurity nanoparticles on transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Fig. 7. Imaging of impurity nanoparticles on transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Download full size
    Imaging of other impurities on transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Fig. 8. Imaging of other impurities on transferred graphene and propagation direction of SPP is shown as arrow. (a) SPP imaging; (b) SEM imaging

    Download full size
    Tools

    Get Citation

    Copy Citation Text

    Ruxue Wei, Yanwei Wang, Liwen Jiang, Xuqing Sun, Hongyao Liu, Chang Wang, Xinchao Lu, Weier Lu, Yang Xia, Chengjun Huang. Detection of Chemical Vapor Deposition-Prepared Graphene by Surface Plasmon Polariton Imaging[J]. Acta Optica Sinica, 2019, 39(11): 1124002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: Optics at Surfaces

    Received: Jun. 24, 2019

    Accepted: Jul. 24, 2019

    Published Online: Nov. 6, 2019

    The Author Email: Lu Xinchao (luxinchao@ime.ac.cn), Lu Weier (luweier@ime.ac.cn)

    DOI:10.3788/AOS201939.1124002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology