Chinese Optics Letters, Volume. 3, Issue 7, 07428(2005)

Effects of oxygen partial pressure on optical absorption edge and UV emission energy of ZnO films

Ruijin Hong1,2, Jianda Shao1, Hongbo He1, and Zhengxiu Fan1
Author Affiliations
  • 1Research and Development Center for Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800
  • 2Graduate School of the Chinese Academy of Sciences, Beijing 100864
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    The optical absorption edge and ultraviolet (UV) emission energy of ZnO films deposited by direct current (DC) reactive magnetron sputtering at room temperature have been investigated. With the oxygen ratio increasing, the structure of films changes from zinc and zinc oxide coexisting phase to single-phase ZnO and finally to the highly (002) orientation. Both the grain size and the stress of ZnO film vary with the oxygen partial pressure. Upon increasing the oxygen partial pressure in the growing ambient, the visible emission in the room-temperature photoluminescence spectra was suppressed without sacrificing the band-edge emission intensity in the ultraviolet region. The peaks of photoluminescence spectra were located at 3.06---3.15 eV. From optical transmittance spectra of ZnO films, the optical band gap edge was observed to shift towards shorter wavelength with the increase of oxygen partial pressure.

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    Ruijin Hong, Jianda Shao, Hongbo He, Zhengxiu Fan, "Effects of oxygen partial pressure on optical absorption edge and UV emission energy of ZnO films," Chin. Opt. Lett. 3, 07428 (2005)

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    Paper Information

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    Received: Sep. 15, 2004

    Accepted: --

    Published Online: Jun. 6, 2006

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