Laser & Optoelectronics Progress, Volume. 53, Issue 10, 103101(2016)

Spectral Ellipsometry of Dielectric/Metal/Dielectric Transparent Conductive Multi-Layer Films

Sun Yao1,2,3、* and Wang Hong1,2,3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    References(17)

    [1] [1] Liu Jing, Liu Dan, Gu Zhen′an. Research progress of D/M/D transparent conductive multilayer films[J]. Materials Review, 2005, 8(19): 9-12.

    [2] [2] Sun Yao, Wang Yongbin, Wang Hong. Agglomeration morphology and element segregation of Ag film in low-emissivity stacks[J]. Bulletin of the Chinese Ceramic Society, 2015, 34(s): 96-100.

    [4] [4] Sun Y, Wang H. Influence of deposition mode in reactively sputtered ZnO underlayer on thermal stability of thin silver films[J]. Materials Science Forum, 2016, 852: 1018-1024.

    [5] [5] Sun Yao, Wang Hong. Surface modification of glass substrate by linear ion source[J]. Journal of the Chinese Ceramic Society, 2015, 43(11): 1561-1566.

    [6] [6] Danisman K, Danisman S, Savas S, et al. Modelling of the hysteresis effect of target voltage in reactive magnetron sputtering process by using neural networks[J]. Surface and Coatings Technology, 2009, 204(5): 610-614.

    [8] [8] Herzinger C M, Johs B D. Dielectric function parametric model and method of use: US5796983A[P]. 1998-08-18.

    [9] [9] Synowicki R A. Suppression of backside reflections from transparent substrates[J]. Physica Status Solidi (c), 2008, 5(5): 1085-1088.

    [10] [10] Hong R J, Qi H J, Huang J B, et al. Influence of oxygen partial pressure on the structure and photoluminescence of direct current reactive magnetron sputtering ZnO thin films[J]. Thin Solid Films, 2005, 473(1): 58-62.

    [11] [11] Cho E N, Park S, Yun I. Spectroscopic ellipsometry modeling of ZnO thin films with various O2 partial pressures[J]. Current Applied Physics, 2012, 12(6): 1606-1610.

    [13] [13] Tang Jinfa, Gu Peifu, Liu Xu, et al. Modern optical thin film technology[M]. Hangzhou: Zhejiang University Press, 2013: 17.

    [14] [14] Zhu Xiaolong, Xiao Jun, Ma Zi. Wide spectrum optical properties for HFO2 films[J]. Laser & Optoelectronics Progress, 2016, 53(3): 033101.

    [15] [15] Zhao Qingnan, Dong Yuhong, Liu Ying, et al. Surface composition and refractive index of the as-deposited and rapidly annealed silicon nitride thin films[J]. Journal of Wuhan University of Technology, 2010, 32(22): 156-159.

    [16] [16] Tian Shi. Physical properties of materials[M]. Beijing: Beihang University Press, 2001: 58.

    [17] [17] Sun Yao, Wang Hong. Influence of sputter parameters on optical constants of SiNx dielectric film in D/M/D structures[J]. Journal of Aeronautical Materials, 2015, 35(4): 28-33.

    Tools

    Get Citation

    Copy Citation Text

    Sun Yao, Wang Hong. Spectral Ellipsometry of Dielectric/Metal/Dielectric Transparent Conductive Multi-Layer Films[J]. Laser & Optoelectronics Progress, 2016, 53(10): 103101

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Thin Films

    Received: Jun. 8, 2016

    Accepted: --

    Published Online: Oct. 12, 2016

    The Author Email: Sun Yao (sunyao119@163.com)

    DOI:10.3788/lop53.103101

    Topics