Multi-wavelength displacement interferometry based on square wave phase modulation

Qi LIU; Shanyong CHEN

doi:10.5768/JAO202546.0311008

Journal of Applied Optics, Volume. 46, Issue 3, 538(2025)

Multi-wavelength displacement interferometry based on square wave phase modulation

Qi LIU^1,2,3、* and Shanyong CHEN^1,2,3

Author Affiliations

¹College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, China

²National Key Laboratory of Equipment State Sensing and Smart Support, National University of Defense Technology, Changsha 410073, China

³Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, China

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Figures & Tables(8)

Fig. 1. Structure diagram of MWFDS system

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Fig. 2. Multi-wavelength PGC-Atan algorithm

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Fig. 3. Multi-wavelength SWPMD demodulation algorithm

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Fig. 4. Displacement reproduction results of modulated signals with different frequencies after demodulation

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Fig. 5. Displacement reproduction results of square wave modulation signals by using different initial phases

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Fig. 6. Complex displacement reproduction results

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Fig. 7. Square wave displacement reproduction results

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Table 1. Simulation experiment parameters
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Table 1. Simulation experiment parameters
变量赋值
λ₁/nm 1 530.33
λ₂/nm 1 560.61
t/s 0.1
d/m 0.1
f_k/kHz 250
A₁, A₂ 50
M/rad 2.63

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Qi LIU, Shanyong CHEN. Multi-wavelength displacement interferometry based on square wave phase modulation[J]. Journal of Applied Optics, 2025, 46(3): 538

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