Target Deviation of SG Facility Based on Active Vibration Absorption Control

Wenhui Cui; Jianqiang Zhu; Yuanqi He; Zhigang Liu; Quantang Fan; Weiheng Lin; Ziming Dong

doi:10.3788/CJL202148.2401003

Chinese Journal of Lasers, Volume. 48, Issue 24, 2401003(2021)

Target Deviation of SG Facility Based on Active Vibration Absorption Control

Wenhui Cui^1,2、*, Jianqiang Zhu^1、**, Yuanqi He^1,2, Zhigang Liu¹, Quantang Fan¹, Weiheng Lin^1,2, and Ziming Dong¹

¹Joint Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Figures & Tables(20)

Fig. 1. Schematic of overall optical path arrangement of SG-Ⅱ series laser facility

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Fig. 2. Full link beam transmission model of SG-Ⅱ series facility

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Fig. 3. Optomechanical coupling active vibration absorption system in the spatial filter

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Fig. 4. Model of optomechanical coupling dynamic vibration absorption system

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Fig. 5. Diagram of beam transmission misalignment of spatial filter

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Fig. 6. Control flow of adaptive fuzzy-PID

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Fig. 7. Self-calibration flow chart

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Fig. 8. Variation rules of output light angle response peak value of optomechanical coupling active vibration absorption system under parameter regulation. (a) Effect analysis of velocity feedback gain g_P; (b) effect analysis of displacement feedback gain g_I

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Fig. 9. Control parameter optimization using the optomechanical coupling active vibration absorption system. (a) Optimization of velocity feedback gaing_P; (b) optimization of displacement feedback gaing_I

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Fig. 10. Comparison of output angle response peak control effects of three control modes

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Fig. 11. Comparison of shooting error control results of spatial filter in SG-Ⅱ spatial filter

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Fig. 12. Comparison of shooting deviation control results of spatial filter in SG-Ⅱ high-energy laser system

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Fig. 13. Comparison of target shooting deviation control results of spatial filter in SG-Ⅱ upgrading facility

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Table 1. ΔK_P fuzzy control rules
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Table 1. ΔK_P fuzzy control rules
e e_c
NB NM NS ZO PS PM PB
NB PB PB PM PM PS ZO ZO
NM PB PB PM PS PS ZO NS
NS PM PM PM PS ZO NS NS
ZO PM PM PS ZO NS NM NM
PS PS PS ZO NS NS NM NM
PM PS ZO NS NM NM NM NB
PB ZO ZO NM NM NM NB NB

Table 2. ΔK_I fuzzy control rules
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Table 2. ΔK_I fuzzy control rules
e e_c
NB NM NS ZO PS PM PB
NB NB NB NM NM NS ZO ZO
NM NB NB NM NS NS ZO ZO
NS NB NM NS NS ZO PS PS
ZO NM NM NS ZO PS PM PM
PS NM NS ZO PS PS PM PB
PM ZO ZO PS PS PM PB PB
PB ZO ZO PS PM PM PB PB

Table 3. ΔK_D fuzzy control rules
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Table 3. ΔK_D fuzzy control rules
e e_c
NB NM NS ZO PS PM PB
NB PS NS NB NB NB NM PS
NM PS NS NB NM NM NS ZO
NS ZO NS NM NM NS NS ZO
ZO ZO NS NS NS NS NS ZO
PS ZO ZO ZO ZO ZO ZO ZO
PM PB NS PS PS PS PS PB
PB PB PM PM PM PS PS PB

Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

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Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

Spatial filter	f_i_,2 /m	m_i	q_i	Δx_tradit /μm	Δx_PDVA /μm	Δx_ADVA /μm
SF₀	1.000	2.000	0.0034	0.252	0.172	0.060
SF₁	1.956	2.455	0.0043	0.319	0.219	0.075
SF₂	1.860	3.014	0.0137	1.020	0.697	0.240
SF₃	4.600	3.433	0.0190	1.410	0.967	0.504
SF₄	1.752	1.000	0.0499	3.710	2.540	0.874
SF₅	3.950	1.819	0.0403	2.990	2.050	0.706
SF₆	3.231	1.430	0.0704	5.230	3.580	1.230
SF₇	9.856	2.243	0.0518	3.850	2.640	0.907
SF₈	14.502	1.470	0.0517	3.840	2.630	0.906

Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

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Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

Spatial filter	f_i_,2/m	m_i	q_i	Δx_tradit/μm	Δx_PDVA/μm	Δx_ADVA/μm
SF₀	1.0000	2.000	0.0061	0.45	0.31	0.107
SF₁	1.9559	2.455	0.0076	0.57	0.39	0.133
SF₂	1.8600	3.014	0.0241	1.79	1.23	0.421
SF₃	2.3825	2.960	0.0556	4.13	2.83	0.974
SF₄	1.9971	2.000	0.1327	9.86	6.75	2.320
SF₅	4.0808	1.500	0.0974	7.24	4.96	1.710
SF₆	4.8643	2.120	0.1733	12.90	8.82	3.040
SF₇	5.6547	1.730	0.2579	19.20	13.10	4.520
SF₈	8.4876	1.080	0.1856	13.80	9.44	3.250

Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

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Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

Spatial filter	f_i_,2/m	m_i	q_i	Δx_tradit/μm	Δx_PDVA/μm	Δx_ADVA/μm
SF₀	1.800	1.0000	0.0400	2.97	2.04	0.70
SF₁	2.080	1.6000	0.0554	4.12	2.82	0.97
SF₂	2.850	1.5000	0.0607	4.51	3.09	1.06
SF₃	2.600	2.0000	0.1330	9.88	6.77	2.33
SF₄	16.000	6.4584	0.1396	10.40	7.10	2.45
SF₅	11.117	0.9355	0.1880	14.00	9.57	3.29
SF₆	11.883	1.0689	0.1880	14.00	9.57	3.29
SF₇	11.117	0.9355	0.1880	14.00	9.57	3.29
SF₈	11.883	1.0689	0.1880	14.00	9.57	3.29
SF₉	16.000	1.0000	0.1396	10.40	7.10	2.45

Table 7. Shooting accuracy test data of SG-Ⅱ series facilities
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Table 7. Shooting accuracy test data of SG-Ⅱ series facilities
Test system Δx_tradit/μm Δx_PDVA/μm Δx_ADVA/μm
SG-Ⅱ facility 5.41 3.73 1.30
SG-Ⅱ high-energy laser system 7.67 5.31 1.87
SG-Ⅱ upgrading facility 6.52 4.50 1.57

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Wenhui Cui, Jianqiang Zhu, Yuanqi He, Zhigang Liu, Quantang Fan, Weiheng Lin, Ziming Dong. Target Deviation of SG Facility Based on Active Vibration Absorption Control[J]. Chinese Journal of Lasers, 2021, 48(24): 2401003

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Paper Information

Category: laser devices and laser physics

Received: May. 13, 2021

Accepted: May. 28, 2021

Published Online: Nov. 16, 2021

The Author Email: Cui Wenhui (whcui@siom.ac.cn), Zhu Jianqiang (jqzhu@siom.ac.cn)

DOI:10.3788/CJL202148.2401003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. ΔK_P fuzzy control rules

Table 1. ΔK_P fuzzy control rules

Table 2. ΔK_I fuzzy control rules

Table 2. ΔK_I fuzzy control rules

Table 3. ΔK_D fuzzy control rules

Table 3. ΔK_D fuzzy control rules

Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

Table 7. Shooting accuracy test data of SG-Ⅱ series facilities

Table 7. Shooting accuracy test data of SG-Ⅱ series facilities

Table 1. ΔKP fuzzy control rules

Table 1. ΔKP fuzzy control rules

Table 2. ΔKI fuzzy control rules

Table 2. ΔKI fuzzy control rules

Table 3. ΔKD fuzzy control rules

Table 3. ΔKD fuzzy control rules

Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

Table 4. Spatial filter parameters and target deviation control indexes of SG-Ⅱ facility

Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

Table 5. Spatial filter parameters and target deviation control indexes of SG-Ⅱ high-energy laser system

Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

Table 6. Spatial filter parameters and target deviation control indexes of SG-Ⅱ upgrading facility

Table 7. Shooting accuracy test data of SG-Ⅱ series facilities

Table 7. Shooting accuracy test data of SG-Ⅱ series facilities

Table 1. ΔK_P fuzzy control rules

Table 1. ΔK_P fuzzy control rules

Table 2. ΔK_I fuzzy control rules

Table 2. ΔK_I fuzzy control rules

Table 3. ΔK_D fuzzy control rules

Table 3. ΔK_D fuzzy control rules