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INFRARED, Volume. 44, Issue 11, 6(2023)

Study on Electrode Contact Hole Etching Technique of Long-Wave Infrared HgCdTe Focal Plane Detectors with Low Damage

Jing-feng LI, Shi-guang LIU, Ti NING, Ming LIU, and Dan WANG
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    [2] [2] Ragalski A. Recent Progress in Infrared Detector Technologies \[J\]. Infrared Physics and Technology, 2011, 54: 136-164.

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    LI Jing-feng, LIU Shi-guang, NING Ti, LIU Ming, WANG Dan. Study on Electrode Contact Hole Etching Technique of Long-Wave Infrared HgCdTe Focal Plane Detectors with Low Damage[J]. INFRARED, 2023, 44(11): 6

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    Received: Jun. 9, 2023

    Accepted: --

    Published Online: Jan. 16, 2024

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    DOI:10.3969/j.issn.1672-8785.2023.11.002

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology