Optics and Precision Engineering, Volume. 19, Issue 4, 783(2011)
Nonlinear characteristics of sub-micron cantilever beam resonators actuated by statical electricity
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YUE Dong-xu, YU Hong, YUAN Wei-min. Nonlinear characteristics of sub-micron cantilever beam resonators actuated by statical electricity[J]. Optics and Precision Engineering, 2011, 19(4): 783
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Received: Mar. 15, 2010
Accepted: --
Published Online: Jun. 14, 2011
The Author Email: YUE Dong-xu (dxyuehd@163.com)
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