[2] R Brandenburg, P Bruggeman, F Iza. Plasma Sources Science and Technology, 26, 123002(2017).

[5] D Huang B, K Takashima, M Zhu X et al. Journal of Physics D: Applied Physics, 46, 464011(2013).

[6] T A L Burm K. Plasma Sources Science and Technology, 13, 387(2004).

[7] C Li, J Shi, Y Wang et al. Plasma Science and Technology, 19, 115403(2017).

[8] A Roettgen, I Shkurenkov, M Simeni S et al. Plasma Sources Science and Technology, 25, 055009(2016).

[9] J Chen C, Z Li S, M Simeni Someni et al. Plasma Sources Science and Technology, 29, 035020(2020).

[10] W Choe, Y Moon S, S Park et al. Advances in Physics: X, 4, 1526114(2019).

[11] F Gaboriau, N Kang, S Oh et al. Plasma Sources Science and Technology, 20, 045015(2011).

[12] J Bruggeman P, N Sadeghi, C Schram D et al. Plasma Sources Science and Technology, 23, 023001(2014).

[13] S Liu, M Qian, C Yang et al. Plasma Sources Science and Technology, 25, 055012(2016).

[14] K Behringer, U Fantz, B Schalk. New Journal of Physics, 2, 7(2000).