Study on the material-remove mechanism of SiC surface polishing

Chinese Optics Letters, Volume. 12, Issue s2, S22201(2014)

Fan Di^1,2

¹Key Laboratory of Optical System Advanced Manufacturing Technology, Chinese Academy of Sciences, Changchun 130033, China

²Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

show less

References(11)

[1] [1] M. J. Cumbo, D. Fairhurst, S. D. Jacobs, and B. E. Puchebner, Appl. Opt. 34, 3743 (1995).

[2] [2] F. Zhang, Chin. J. Lasers 7, 40 (2013).

[3] [3] J. L. Wang, Postdoctoral Research Report 6 (2002).

[4] [4] S. Malkin and T. W. Hwang, Ann. CIRP. 45, 569 1996.

[5] [5] W. Deng and F. Zhang, Chin. Opt. Lett. 11, S22201 (2013).

[6] [6] Z. H. Deng, B. Zhang, and Z. Y. Sun, Diam. Abrasives Eng. 2, 47 (2002).

[7] [7] Z. X. Liu, Ceram. Grinding 1, 36 (1998).

[8] [8] D. Fan, Z. Y. Zhang, and H. Y. Niu, Opt. Tech. 30, 6 (2004).

[9] [9] D. Fan, Z. X. Zhang, and Z. Y. Zhang, Opt. Tech. 29, 667 (2003).

[10] [10] D. Fan, Z. Y. Zhang, and H. Y. Niu, J Chin. Ceram. Soc. 31, 1096 (2003).

[11] [11] L. Rich and D. A. Crowe, Proc. SPIE 2543, 236 (1995).

Cited By

Tools

Get Citation

Copy Citation Text

Fan Di, "Study on the material-remove mechanism of SiC surface polishing," Chin. Opt. Lett. 12, S22201 (2014)

Download Citation

Paper Information

Category: Optical Design and Fabrication

Received: Dec. 7, 2013

Accepted: Mar. 15, 2014

Published Online: Nov. 12, 2014

The Author Email:

Topics