Chinese Journal of Lasers, Volume. 46, Issue 2, 0204008(2019)

Power Spectral Density Test of Large Aperture Optical Elements by Stitching Interferometry

Ang Liu*, Yuhang He, Qiang Li, Bo Gao, Qikai Shi, Liqun Chai, and Qiao Xu
Author Affiliations
  • Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China
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    Figures & Tables(11)
    Schematic of wavefront detection of optical elements. (a) Reflected wavefront detection; (b) transmitted wavefront detection
    Schematic of 1D PSD calculation
    Flow chart of subaperture stitching
    Schematic of correlation match. (a) Template extraction from left aperture; (b) matrix to be matched extracted from right aperture
    Simulation results. (a) Reference surface; (b) stitching surface; (c) correlation coefficient
    Process of stitching operation. (a) Plan of subaperture; (b) sub1; (c) sub2; (d) correlation coefficient
    Comparison between stitching and full-aperture test results. (a) Stitching wavefront measurement; (b) full-aperture wavefront measurement; (c) stitching wavefront WPSD; (d) full-aperture wavefront WPSD
    Comparison of 1D PSD calculation. (a) 0°; (b) 30°; (c) 60°; (d) 90°; (e) 120°; (f) 150°
    • Table 1. Simulation results

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      Table 1. Simulation results

      ParameterdpvPRMS /nmD /pixel
      Reference surface0.2607λ1.839713×508
      Stitching surface0.2574λ1.837713×508
    • Table 2. Results of stitching operation

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      Table 2. Results of stitching operation

      Mask location /pixelCorrelation match /pixelCorrection coefficient
      LeftRightRowColumnX tiltY tiltTranslation
      (753,480)(755,93)33092-9.97×10-6λ1.48×10-4λ-0.0356λ
    • Table 3. Experimental results of reliability

      View table

      Table 3. Experimental results of reliability

      ExperimentdpvPRMS/nmDeviation
      StitchingFullStitchingFulldpvPRMS /nm
      10.268λ0.271λ1.1781.189-0.003λ-0.011
      20.114λ0.116λ1.0101.030-0.002λ-0.020
      30.186λ0.198λ1.0681.078-0.012λ-0.010
      40.081λ0.086λ0.6870.694-0.005λ-0.007
      50.202λ0.200λ0.9220.9210.002λ0.001
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    Ang Liu, Yuhang He, Qiang Li, Bo Gao, Qikai Shi, Liqun Chai, Qiao Xu. Power Spectral Density Test of Large Aperture Optical Elements by Stitching Interferometry[J]. Chinese Journal of Lasers, 2019, 46(2): 0204008

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 29, 2018

    Accepted: Nov. 11, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0204008

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