Optics and Precision Engineering, Volume. 21, Issue 2, 400(2013)
Large-scale MOEMS scanning mirror actuated by vertical comb
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LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400
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Received: Sep. 5, 2012
Accepted: --
Published Online: Feb. 26, 2013
The Author Email: LIU Ying-ming (liuyingming@mail.sim.ac.cn)
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