Optical Technique, Volume. 48, Issue 5, 566(2022)
Laser differential confocal radius measurement with high precision and high efficiency
[1] [1] Davies A D, Schmitz T L. Defining the measurand in radius of curvature measurements[J]. Proceedings of SPIE-The International Society for Optical Engineering,2003,5190:134-145.
[2] [2] Mantravadi M V, Malacara D. Newton, fizeau, and haidinger interferometers[M]. Optical Shop Testing,2020:1-45.
[3] [3] J W Gates, K J Habell, S P Middleton. A precision spherometer[J]. Sci.Instrum,1954,31(2):60-64.
[4] [4] Yoshizumi K, Murao T, Masui J, et al. Ultrahigh accuracy 3-D profilometer[J]. Applied Optics,1987,26(9):1647-53.
[5] [5] Chunyu Zhao. Measuring the radius of curvature of a spherical mirror with an interferometer and a laser tracker[J]. Optical Engineering,2005,44(9):090506.
[6] [6] Hugo T J, Lessing N V W. Determination of long radii of curvature of positive lenses[J]. Applied Optics,1964,3(4):483-485.
[7] [7] Thetford A . Optical shop testing: Edited by D. Malacara John Wiley, 1978, 21.15[J]. Optics & Laser Technology,1979,11(1):55-55.
[8] [8] Virdee M S . High accuracy form measurement of specularly reflecting surfaces by laser autocollimation[J]. Proceedings of SPIE-The International Society for Optical Engineering,1986:676.
[9] [9] Griesmann U, Soons J, Wang Q, et al. Measuring form and radius of spheres with interferometry[J]. CIRP Annals-Manufacturing Technology,2004,53(1):451-454.
[10] [10] Kredba J, Psota P, Stasik M, et al. Absolute interferometry for fast and precise radius measurement[J]. Optics Express,2021,29(8):12531-12542
[12] [12] W Zhao, R Sun, L Qiu, et al. Laser differential confocal radius measurement[J]. Opt.Express,2010,18:2345-2360.
Get Citation
Copy Citation Text
LI Jinjin, LI Qi, CUI Jian, QIU Lirong, WANG Yun, YANG Shuai. Laser differential confocal radius measurement with high precision and high efficiency[J]. Optical Technique, 2022, 48(5): 566
Category:
Received: Apr. 18, 2022
Accepted: --
Published Online: Jan. 20, 2023
The Author Email:
CSTR:32186.14.