Optical Technique, Volume. 48, Issue 5, 566(2022)

Laser differential confocal radius measurement with high precision and high efficiency

LI Jinjin, LI Qi, CUI Jian, QIU Lirong, WANG Yun, and YANG Shuai
Author Affiliations
  • [in Chinese]
  • show less
    References(11)

    [1] [1] Davies A D, Schmitz T L. Defining the measurand in radius of curvature measurements[J]. Proceedings of SPIE-The International Society for Optical Engineering,2003,5190:134-145.

    [2] [2] Mantravadi M V, Malacara D. Newton, fizeau, and haidinger interferometers[M]. Optical Shop Testing,2020:1-45.

    [3] [3] J W Gates, K J Habell, S P Middleton. A precision spherometer[J]. Sci.Instrum,1954,31(2):60-64.

    [4] [4] Yoshizumi K, Murao T, Masui J, et al. Ultrahigh accuracy 3-D profilometer[J]. Applied Optics,1987,26(9):1647-53.

    [5] [5] Chunyu Zhao. Measuring the radius of curvature of a spherical mirror with an interferometer and a laser tracker[J]. Optical Engineering,2005,44(9):090506.

    [6] [6] Hugo T J, Lessing N V W. Determination of long radii of curvature of positive lenses[J]. Applied Optics,1964,3(4):483-485.

    [7] [7] Thetford A . Optical shop testing: Edited by D. Malacara John Wiley, 1978, 21.15[J]. Optics & Laser Technology,1979,11(1):55-55.

    [8] [8] Virdee M S . High accuracy form measurement of specularly reflecting surfaces by laser autocollimation[J]. Proceedings of SPIE-The International Society for Optical Engineering,1986:676.

    [9] [9] Griesmann U, Soons J, Wang Q, et al. Measuring form and radius of spheres with interferometry[J]. CIRP Annals-Manufacturing Technology,2004,53(1):451-454.

    [10] [10] Kredba J, Psota P, Stasik M, et al. Absolute interferometry for fast and precise radius measurement[J]. Optics Express,2021,29(8):12531-12542

    [12] [12] W Zhao, R Sun, L Qiu, et al. Laser differential confocal radius measurement[J]. Opt.Express,2010,18:2345-2360.

    Tools

    Get Citation

    Copy Citation Text

    LI Jinjin, LI Qi, CUI Jian, QIU Lirong, WANG Yun, YANG Shuai. Laser differential confocal radius measurement with high precision and high efficiency[J]. Optical Technique, 2022, 48(5): 566

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Apr. 18, 2022

    Accepted: --

    Published Online: Jan. 20, 2023

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics