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Optics and Precision Engineering, Volume. 17, Issue 6, 1350(2009)

Driving-mode test of dual-mass MEMS gyroscope

YIN Yong1、*, WANG Shou-rong1, WANG Cun-chao1, YANG Bo1, SHENG Ping1, and TIAN Zhong2
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    YIN Yong, WANG Shou-rong, WANG Cun-chao, YANG Bo, SHENG Ping, TIAN Zhong. Driving-mode test of dual-mass MEMS gyroscope[J]. Optics and Precision Engineering, 2009, 17(6): 1350

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    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: YIN Yong (yinyong_seu@163.com)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology