Fig. 1. Schematic of metal film based thermo-optic phase-shifter for TFLN devices

Fig. 2. Effect of distance between metal electrodes and TFLN waveguides on transmission loss. (a) Mode field distribution of TFLN under this structure; (b) effect of distance between metal electrodes and TFLN waveguides on transmission loss per millimeter waveguide

Fig. 3. Temperature variation of three waveguides under different parameters. (a) Variation of average temperature and (b) maximum temperature difference with parameters; (c) structure and temperature distribution at maximum average temperature

Fig. 4. Comparison results. (a) Normalized thermal crosstalk between adjacent waveguides under different structural parameters; when d₁>2 μm, (b) two and (c) three optimal electrode layouts and temperature distributions

Fig. 5. 3D multi-physics simulation results based on electrode layout obtained from 2D model. (a) Schematic of 3D model; (b) average temperature within the three waveguides area varies with the loading voltage; (c)(d) temperature distribution of the structure in different areas under 1.7 V; (e) charge distribution of Ag electrode surface under 1.7 V

Fig. 6. Transient response performance of thermal-optical phase-shifters in 3D multi physics field simulation structures