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Spectroscopy and Spectral Analysis, Volume. 36, Issue 3, 635(2016)

Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature

DUAN Liang-fei1,2、*, YANG Wen1,2, ZHANG Li-yuan1,2, LI Xue-ming1,2, CHEN Xiao-bo1,2, and YANG Pei-zhi1,2
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    DUAN Liang-fei, YANG Wen, ZHANG Li-yuan, LI Xue-ming, CHEN Xiao-bo, YANG Pei-zhi. Study on the Properties of the Pc-Si Films Prepared by Magnetron Co-Sputtering at Low Temperature[J]. Spectroscopy and Spectral Analysis, 2016, 36(3): 635

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    Paper Information

    Received: Oct. 11, 2014

    Accepted: --

    Published Online: Dec. 9, 2016

    The Author Email: DUAN Liang-fei (liangfeiduan@hotmail.com)

    DOI:10.3964/j.issn.1000-0593(2016)03-0635-05

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology