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Chinese Optics Letters, Volume. 13, Issue 2, 021301(2015)

Study of selectively buried ion-exchange glass waveguides using backside masking

Chongyang Pei1, Gencheng Wang1, Bing Yang1, Longzhi Yang1, Yinlei Hao1,2, Xiaoqing Jiang1,2, and Jianyi Yang1,2、*
Author Affiliations
  • 1Department of Information Science and Electronics Engineering, Zhejiang University, Hangzhou 310027, China
  • 2Cyrus Tang Center for Sensor Materials and Applications, Zhejiang University, Hangzhou 310027, China
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    Schematic of the chip, and the definition of D.

    Fig. 1. Schematic of the chip, and the definition of D.

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    Process flow for the realization of SBWs. (a) The mask deposition, photolithography process, and chemical etching and backside mask deposition. (b) The thermal Ag+/Na+ exchange. (c) The chemical etching of both masks. (d) The backside dielectric mask deposition. (e) The electric-assisted ion-diffusion.

    Fig. 2. Process flow for the realization of SBWs. (a) The mask deposition, photolithography process, and chemical etching and backside mask deposition. (b) The thermal Ag+/Na+ exchange. (c) The chemical etching of both masks. (d) The backside dielectric mask deposition. (e) The electric-assisted ion-diffusion.

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    (a) Buried depth. (b) The output cross-section view of the waveguides.

    Fig. 3. (a) Buried depth. (b) The output cross-section view of the waveguides.

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    The schematic of the different regions of the SBW.

    Fig. 4. The schematic of the different regions of the SBW.

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    The measured IL of the SBWs, with the different lengths of the backside mask.

    Fig. 5. The measured IL of the SBWs, with the different lengths of the backside mask.

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    Chongyang Pei, Gencheng Wang, Bing Yang, Longzhi Yang, Yinlei Hao, Xiaoqing Jiang, Jianyi Yang, "Study of selectively buried ion-exchange glass waveguides using backside masking," Chin. Opt. Lett. 13, 021301 (2015)

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    Paper Information

    Category: Integrated Optics

    Received: Sep. 15, 2014

    Accepted: Nov. 14, 2014

    Published Online: Sep. 25, 2018

    The Author Email: Jianyi Yang (yangjy@zju.edu.cn)

    DOI:10.3788/COL201513.021301

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology