Fig. 1. Proposed 3 dB optical power splitter

Fig. 2. Field distribution and performance analysis of the proposed 3 dB optical power splitter . (a) Field distribution of the fundamental TE mode (E_x) at three wavelengths; (b) the ideal performance of the 3 dB optical power splitter and its performance under the influence of ±15 nm processing error

Fig. 3. Process of preparing optical power splitter and grating coupler

Fig. 4. SEM images of the optical power splitter. (a) Optical power splitter chip as a whole; (b) individual optical power splitter; (c) detail enlargement of individual optical power splitter in the beam splitting area; (d) actual processing dimensions of SWG region

Fig. 5. Equipment used in the test. (a) Diagram of vertical coupling test system; (b) vertical coupling test rig

Fig. 6. Comparison of simulation and test results. (a) Excess loss of optical power splitter under simulation; (b) actual measurement of the excess loss of the optical power splitter

Fig. 7. Comparison of simulation and test results. (a) Splitting ratio of optical power splitter under simulation; (b) actual measurement of the splitting ratio of the optical power splitter