International Journal of Extreme Manufacturing, Volume. 7, Issue 2, 25102(2025)

Atomic surface of diamond induced by novel green photocatalytic chemical mechanical polishing with high material removal rate

Yu Zhibin, Zhang Zhenyu, Zeng Zinuo, Fan Cheng, Gu Yang, Shi Chunjing, Zhou Hongxiu, Meng Fanning, and Feng Junyuan
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Yu Zhibin, Zhang Zhenyu, Zeng Zinuo, Fan Cheng, Gu Yang, Shi Chunjing, Zhou Hongxiu, Meng Fanning, Feng Junyuan. Atomic surface of diamond induced by novel green photocatalytic chemical mechanical polishing with high material removal rate[J]. International Journal of Extreme Manufacturing, 2025, 7(2): 25102

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Received: Jun. 27, 2024

Accepted: May. 29, 2025

Published Online: May. 29, 2025

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DOI:10.1088/2631-7990/ad97f7

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