Multi-Magnification Topographic Data Fusion Method Based on White Light Microscopic Interferometry

Magnification	NA	f_s /μm^-1	Resolution /μm	FOV /mm	θ_max /（°）
5×	0.13	0.483	2.736	1.41×1.41	7.470
10×	0.30	1.115	1.185	0.71×0.71	17.458
20×	0.40	1.487	0.889	0.35×0.35	23.578
50×	0.55	2.045	0.647	0.14×0.14	33.367
100×	0.70	2.602	0.508	0.07×0.07	44.427

Table 2. Fusion strategy

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Table 2. Fusion strategy

$f$	$S \in (0, 1 / 6]$	$S \in (1 / 6, 1 / 3]$	$S \in (1 / 3, 1 / 2]$	$S \in (1 / 2, 2 / 3]$	$S \in (2 / 3, 5 / 6]$	$S \in (5 / 6, 1]$
f₁	q₁	q₁	q₁	q₁	q₁	q₁
f₂	q₂ $\oplus$ p₂	q₂ $\oplus$ p₂	q₂ $\oplus$ p₂	q₂ $\oplus$ p₂	q₂ $\oplus$ p₂	q₂ $\oplus$ p₂
f₃	p₃	p₃	q₃ $\oplus$ p₃	q₃ $\oplus$ p₃	q₃ $\oplus$ p₃	p₃
f₄	p₄	p₄	p₄	p₄	q₄ $\oplus$ p₄	—
f₅	p₅	p₅	p₅	p₅	p₅	—
f₆	p₆	p₆	p₆	p₆	p₆	—
f₇	p₇	—	—	—	—	—
f₈	p₈	—	—	—	—	—
f₉	p₉	—	—	—	—	—

Table 3. Measurement data
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Table 3. Measurement data
Method Period /μm Height/mm Radius of curvature /mm
X-direction Y-direction
5× 510.600 2.742 11.530 11.417
20× — 2.575 12.487 12.447
Fusion 496.110 2.671 12.323 12.167

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Shucheng Xu, Qun Yuan, Xiaoxin Fan, Jiale Zhang, Yicen Ma, Chen Ding, Zhenyan Guo, Zhishan Gao. Multi-Magnification Topographic Data Fusion Method Based on White Light Microscopic Interferometry[J]. Acta Optica Sinica, 2025, 45(8): 0812001

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