Fig. 1. Comparison of different amplifiers

Fig. 2. Two-dimensional compliant driving mechanism

Fig. 3. Stick-slip positioning stage

Fig. 4. Key parameters of driving mechanism

Fig. 5. Stick-slip motion principle

Fig. 6. Finite element model of driving mechanism

Fig. 7. Output displacement

Fig. 8. First four modes of stick-slip positioning platform

Fig. 9. Experimental setup of stick-slip positioning platform

Fig. 10. Output displacement

Fig. 11. Stick-slip displacement

Fig. 12. Motion velocity with different driving frequencies

Fig. 13. Relationship between step displacement and vertical load

Fig. 14. Displacement resolution for scanning driving mode

Fig. 15. Displacement resolution for stepping driving mode