Fig. 1. Schematic diagram of femtosecond laser processing system

Fig. 2. Laser processing characteristics of positive photoresist. (a) Influence of spin-coating parameter on thickness of film; (b) relationship between development time and inflation rate of template size; (c) processing effect of “USTC” template

Fig. 3. Hard magnetic material and injection process. (a) Scanning electron microscope image of NdFeB powder; (b) hysteresis loop and (c) optical photo of hard magnetic slurry; (d) injection success rate of slurries prepared with three materials

Fig. 4. Femtosecond laser template-assisted manufacturing of hard magnetic microactuators. (a) Femtosecond laser processing of template; (b) template development; (c) preparation and injection of hard magnetic slurry; (d) removal of excess slurry; (e) magnetization; (f) release

Fig. 5. Fabrication of hard magnetic microactuators. (a) Processing steps of microactuator array; (b) SEM images of triple-flap microactuator; (c) microactuators with different slurry injection ratios

Fig. 6. Actuation of hard magnetic microactuators. (a) Actuation setup; (b) rotational modes of triple microactuators; (c) out-of-step frequencies of microactuators with different slurry injection ratios versus intensity of magnetic field; (d) out-of-step frequencies of microactuators with different lobes versus intensity of magnetic field; (e) actuation data in high-viscosity glycerol solutions; (f) comparison of actuation performance of soft magnetic and hard magnetic microactuators in 60 cP glycerol solution