Dual-beam super-resolution direct laser writing nanofabrication technology

Yaoyu Cao; Fei Xie; Pengda Zhang; Xiangping Li

Opto-Electronic Engineering, Volume. 44, Issue 12, 1254(2017)

Yaoyu Cao, Fei Xie, Pengda Zhang, and Xiangping Li

Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Institute of Photonics Technology, Jinan University, Guangzhou 510632, China

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Yaoyu Cao, Fei Xie, Pengda Zhang, Xiangping Li. Dual-beam super-resolution direct laser writing nanofabrication technology[J]. Opto-Electronic Engineering, 2017, 44(12): 1254

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Paper Information

Category:

Received: --

Accepted: --

Published Online: Jan. 17, 2018

The Author Email:

DOI:

CSTR:32186.14.

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology