Journal of Infrared and Millimeter Waves, Volume. 43, Issue 2, 179(2024)

High-performance spectro-polarimetric filter by integrating subwavelength gratings with Fabry-Perot filter

Yuan-Yu ZHU1,3,4, Xue-Yu GUAN1,4, Pei-Qi YU1,4, Qing-Quan LIU1,2, Qi-Xiang JIA1,2, Jie WU1, Chen-Lu LI1,2,3, Zhi-Feng LI1, and Shao-Wei WANG1,3,4、*
Author Affiliations
  • 1State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China
  • 2School of Physical Science and Technology,ShanghaiTech University,Shanghai 201210,China
  • 3Shanghai Engineering Research Center of Energy-Saving Coatings,Shanghai 200083,China
  • 4University of Chinese Academy of Sciences,Beijing 100049,China
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    Figures & Tables(4)
    (a) Model of the SPF,the SPF with the subwavelength metal grating integrated on the substrate side (top) and partial enlarged view of the structure (bottom);(b) transmission spectra and PER of the SPF,the red solid line and black dashed line are the transmittances of the TM and TE,respectively,and the blue dotted line is the PER of the SPF;(c) the cross-sectional electric fields for the SPF at 10.4 μm;(d) the cross-sectional electric fields for the SPF at 10.6 μm of TE polarized light,the white dashed line is the dividing line between the upper and lower surfaces of the device,and the red dashed box is the grating position
    (a) Schematic diagram of the effective interface method;(b) schematic diagram of the effective medium theory;(c) equivalent refractive index of subwavelength Ag gratings at TE and TM polarized incidence,the red solid line and the blue solid line are the real and imaginary parts of the refractive index of the equivalent medium,respectively
    (a) The TM transmittance of the SPF with different m and n;(b-c) transmittance and PER of the central wavelength when the grating period varies from 0.2 μm to 2 μm;(d-e) transmittance and PER of the central wavelength when the grating duty cycle varies from 0.1 to 0.9;(f-g) transmittance and PER of the central wavelength when the grating thickness varies from 50 nm to 500 nm,the red line represents the transmittance of TM polarized light,the black line represents the transmittance of TE polarized light,the blue line represents the polarization extinction ratio,and the green line represents the peak position of TM polarized light
    (a) Schematic diagram of the on-chip integrated SPFs,each of which consists of four polarization superpixel with polarization angles of 0°,45°,90°,and 135°,respectively,each polarization superpixel is composed of 4 spectral channels,which are represented by small squares of different colors in the figure;(b) the SEM image of the grating;(c) the cross-sectional SEM image of the grating;(d) experimental spectrum and PER of grating and all-dielectric F-P filter;(e) background noise of the measurement system and TE polarized light spectrum of the grating
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    Yuan-Yu ZHU, Xue-Yu GUAN, Pei-Qi YU, Qing-Quan LIU, Qi-Xiang JIA, Jie WU, Chen-Lu LI, Zhi-Feng LI, Shao-Wei WANG. High-performance spectro-polarimetric filter by integrating subwavelength gratings with Fabry-Perot filter[J]. Journal of Infrared and Millimeter Waves, 2024, 43(2): 179

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    Paper Information

    Category: Research Articles

    Received: Jul. 2, 2023

    Accepted: --

    Published Online: Apr. 29, 2024

    The Author Email: Shao-Wei WANG (wangshw@mail.sitp.ac.cn)

    DOI:10.11972/j.issn.1001-9014.2024.02.006

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