Fig. 1. Generation of two different illumination modes based on flexible pupil shaping module. (a) Conventional illumination mode; (b) annular illumination

Fig. 2. Schematic diagram of homogenization unit

Fig. 3. Influence of pupil function on optical field at back focal plane of condenser lens set. (a) Schematic of amplitude distributions of partial sub-beams on back focal plane; (b) schematic of phase distributions of partial sub-beams on back focal plane

Fig. 4. Schematic diagram of light field size

Fig. 5. Influence of microlens pitch size on optical field distribution at back focal plane of condenser lens set. (a) p_x,y=0.1 mm; (b) p_x,y=0.2 mm; (c) p_x,y=0.3 mm; (d) p_x,y=0.4 mm; (e) p_x,y=0.5 mm; (f) p_x,y=0.6 mm; (g) p_x,y=0.7 mm; (h) p_x,y=0.8 mm; (i) p_x,y=0.9 mm; (j) p_x,y=1.0 mm

Fig. 6. Influence of microlens pitch size on evaluation index of light field at back focal plane of condenser lens set. (a) Effect of p_x,y on optical field size; (b) effect of p_x,y on optical field non-uniformity; (c) effect of p_x,y on energy utilization

Fig. 7. Schematic of homogenization unit after introduction of pitch variation in microlens

Fig. 8. Effect of microlens pitch variation on light field distribution at back focal plane of condenser lens set. (a) A=0.01 mm; (b) A=0.02 mm; (c) A=0.03 mm; (d) A=0.04 mm; (e) A=0.05 mm; (f) A=0.06 mm; (g) A=0.07 mm; (h) A=0.08 mm; (i) A=0.09 mm; (j) A=0.1 mm

Fig. 9. Influence of microlens pitch variation on evaluation index of light field at back focal plane of condenser lens set. (a) Effect of A on optical field size; (b) effect of A on optical field non-uniformity; (c) effect of A on energy utilization

Fig. 10. Schematics of microlens array after introducing border line tilting. (a) Structure diagram of microlens array; (b) structure diagram of single microlens in xy plane

Fig. 11. Effect of microlens border line tilt on light field distribution at back focal plane of condenser lens set. (a) B=0.001 mm; (b) B=0.002 mm; (c) B=0.003 mm; (d) B=0.004 mm; (e) B=0.005 mm; (f) B=0.006 mm; (g) B=0.007 mm; (h) B=0.008 mm; (i) B=0.009 mm; (j) B=0.01 mm

Fig. 12. Influence of microlens border line tilt on evaluation index of light field at back focal plane of condenser lens set. (a) Effect of B on optical field size; (b) effect of B on optical field non-uniformity; (c) effect of B on energy utilization

Fig. 13. Schematics of microlens array after combining pitch variation and border line tilting. (a) Structure diagram of microlens array; (b) structure diagram of single microlens in xy plane

Fig. 14. Homogenization results of homogenization unit based on decoherent microlens array. (a) Normalized intensity distribution at back focal plane of condenser lens set; (b) normalized intensity distribution at horizontal section when y=0; (c) normalized intensity distribution at horizontal section when x=0