Optical Technique, Volume. 51, Issue 1, 43(2025)

Study on the infrared optical properties of monocrystalline silicon after annealing and its influencing factors

MA Yuanfei1, JIANG Xinchi2, ZHANG Xu2, CHEN Zhihao2, LV Chao2, and LIN Quan1、*
Author Affiliations
  • 1GRINM Guojing Advanced Materials Co.,Ltd, Langfang 065001, China
  • 2College of Electronic Science and Engineering, State Key Laboratory of Integrated Optoelectronics, Jilin University, Changchun 130012, China
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    References(5)

    [2] [2] Yejing D, Xingfu W, Wenbo P, et al. Largely Improved Near-Infrared Silicon-Photosensing by the Piezo-Phototronic Effect[J]. ACS nano,2017,11(7):7118—7125.

    [6] [6] Huang Z, Zhao L, Li T, et al. Study on the effect of melt flow behavior on the uniformity of phosphorus doping during the growth of large-size n-type monocrystalline silicon by Czochralski method[J]. Materials Science in Semiconductor Processing,2024,175:108261.

    [8] [8] Sueoka K, Kamiyama E, Vanhellemont J, et al. Stress and doping impact on intrinsic point defect behavior in growing single crystal silicon[J]. Physica Status Solidi (b),2014,251(11):2159—2168.

    [9] [9] Zhang J, Ren J C, Liu D. Effect of crucible rotation and crystal rotation on the oxygen distribution at the solid-liquid interface during the growth of Czochralski monocrystalline silicon under superconducting horizontal magnetic field[J]. Results in Physics,2019,13:102127.

    [11] [11] Misiuk A. Effect of stress on creation of defects in annealed Czochralski grown silicon[J]. Physica Status Solidi a-Applications and Materials Science,1999,171(1):191—196.

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    MA Yuanfei, JIANG Xinchi, ZHANG Xu, CHEN Zhihao, LV Chao, LIN Quan. Study on the infrared optical properties of monocrystalline silicon after annealing and its influencing factors[J]. Optical Technique, 2025, 51(1): 43

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    Paper Information

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    Received: Jun. 26, 2024

    Accepted: Feb. 18, 2025

    Published Online: Feb. 18, 2025

    The Author Email: Quan LIN (guoruilq@163.com)

    DOI:

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