[1] [1] HENRI C. Anamphotic lens system method of making the same: US, 1962892A[P]. 19340612.

[2] MIGURA S, KNEER B, NEUMANN J T, et al. Anamorphic high-NA EUV lithography optics[J]. Proceedings of SPIE, 9661, 96610T(2015).

[3] ZHONG ZH J, LI CH Y, LI SH G, . Budget analysis of focus control in advanced lithography (I) -optical path[J]. Chinese Optics, 14, 1104-1119(2021).

[4] TAN Q W, GUO Y D, LI Y, et al. Primary aberration optimization for double-plane symmetric beam shaping systems using a pair of curved reference surfaces[J]. Optics Express, 30, 7664-7676(2022).

[5] KASHIMA S, HAZUMI M, IMADA H, et al. Wide field-of-view crossed Dragone optical system using anamorphic aspherical surfaces[J]. Applied Optics, 57, 4171-4179(2018).

[6] DEHOOG E A. Anamorphic zoom lens based on rotating cylindrical lenses[J]. Optics Express, 29, 12206-12214(2021).

[7] XU CH, SONG W T, WANG Y T. Design of a miniature anamorphic lens with a freeform front group and an aspheric rear group[J]. Optical Engineering, 60, 065104(2021).

[8] WYNNE C G. The primary aberrations of anamorphotic lens systems[J]. Proceedings of the Physical Society. Section B, 67, 529-537(1954).

[9] [9] ROGERS J R. Aberrations of unobscured reflective optical systems[D]. Tucson: University of Arizona, 1983.

[10] ZHANG J K, CHEN X B, LI F J, et al. Paraxial lens design of anamorphic lenses with a fixed anamorphic ratio[J]. OSA Continuum, 2, 1430-1454(2019).

[11] YUAN SH, SASIAN J. Aberrations of anamorphic optical systems. I: the first-order foundation and method for deriving the anamorphic primary aberration coefficients[J]. Applied Optics, 48, 2574-2584(2009).

[12] YUAN SH, SASIAN J. Aberrations of anamorphic optical systems. II. Primary aberration theory for cylindrical anamorphic systems[J]. Applied Optics, 48, 2836-2841(2009).

[13] [13] PAN J H. The Design, Manufacture Test of the Aspherical Optical Surfaces[M]. Suzhou: Soochow University Press, 2004. (in Chinese)

[14] ZHU H, CUI Q F, PIAO M X. Design of unobscured three-mirror anamorphic optical systems[J]. Acta Optica Sinica, 34, 1222005(2014).

[15] [15] YUAN SH. Aberrations of anamphic optical systems[D]. Tucson: University of Arizona, 2008.

[16] BAI X Q, GUO L, MA H C, . Aberration coupling characteristics of axial and lateral misalignments of off-axis three-mirror telescopes[J]. Chinese Optics, 15, 747-760(2022).

[17] MENG Q Y, QIN Z CH, REN CH M, . Review of optical systems′ desensitization design methods[J]. Chinese Optics, 15, 863-877(2022).