[1] [1] MI Jia, LI Hui. Overview of the development of SAW miniaturization technology［J］.Piezoelectrics & Acoustooptics,2012,34(1):4-6.

[2] [2] CHEN Shangquan, LYU Yi, ZHAO Xuemei, et al. Asurface acoustic wave filter based on WLP packaging［J］Piezoelectrics & Acoustooptics,2020,42(4):579-582.

[3] [3] ZHANG Wei, PU Zhiyong, GONG Xu, et al. Design of miniaturized high-stopband suppression surface acoustic wave filter components［J］.Piezoelectrics & Acoustooptics,2023,45(5):677-681.

[4] [4] MIMURA M, AJIMA D, KONOMA C. SH-type spurious response free TC-SAW resonators using low acoustic velocity Rayleigh SAW on LiNbO3 substrate［C］//Kobe,Japan:2018 IEEE International Ultrasonics Symposium (IUS).IEEE,2018:1-9.

[5] [5] NAKAGAWA R, IWAMOTO H, TAKAI T. Low velocity IHP SAW using Al/Pt electrodes for miniaturization［C］//Glasgow,UK:2019 IEEE International Ultrasonics Symposium (IUS).IEEE,2019:2083-2086.

[6] [6] SHI B, WU Z, LIW, et al. Study of Electrode Configuration for Downsizing of SAW Resonators on Low-Cut Lithium Niobate［C］//Venice,Italy:2022 IEEE International Ultrasonics Symposium (IUS).IEEE,2022:1-3.

[7] [7] MIMURA M, AJIMA D, KONOMAC, et al. Small sized band 20 SAW duplexer using low acoustic velocity Rayleigh SAW on LiNbO3 substrate［C］//Washington,DC,USA:2017 IEEE International Ultrasonics Symposium (IUS).IEEE,2017:1-4.

[8] [8] PLESSKY V, YANDRAPALLI S, TURNER P J, et al. 5 GHz laterally-excited bulk-wave resonators (XBARs)based on thin platelets of lithium niobate［J］.Electronics Letters,2019,55(2):98-100.

[9] [9] YANDRAPALLI S, PLESSKY V, KOSKELAJ, et al. Analysis of XBAR resonance and higher order spurious modes［C］//Glasgow,UK:2019 IEEE International Ultrasonics Symposium (IUS).IEEE,2019:185-188.

[10] [10] YU Xiaoquan, HE Jie, MA Jinyi. Latest progress and prospects of piezoelectric MEMS Lamb wave device technology［J］.Piezoelectrics & Acoustooptics,2022,44(2):223-229.

[12] [12] XIAO Qiang, DONG Jiahe, BAI Tao, et al. Research on transverse mode suppression of Cu/15°YX-LiNbO3 SAW resonator［J］.Piezoelectrics & Acoustooptics,2022,44(2):202-204.

[13] [13] HASHIMOTO K, WU Z, WU T, et al. Revisiting piston mode design for radio frequency surface acoustic wave resonators［C］//Munich,Germany:2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM).IEEE,2022:60-63.

[14] [14] SHI Dianxi, LIU Yangyang, SONG Linna, et al. FeaEM:Feature enhancement-based method for weakly supervised salient object detection via multiple pseudo labels\[J\]. Computer Science, 2024, 51(1): 233-242.

[15] [15] SOLAL M, GRATIER J, AIGNERR, et al. Transverse modes suppression and loss reduction for buried electrodes SAW devices［C］//San Diego,CA,USA:2010 IEEE International Ultrasonics Symposium.IEEE,2010:624-628.