Acta Optica Sinica, Volume. 35, Issue 12, 1211003(2015)
Compensator Selection and Accuracy Analysis for Extreme Ultraviolet Lithographic Objective
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Cao Zhen, Li Yanqiu, Sun Yuanyuan. Compensator Selection and Accuracy Analysis for Extreme Ultraviolet Lithographic Objective[J]. Acta Optica Sinica, 2015, 35(12): 1211003
Category: Imaging Systems
Received: Jul. 1, 2015
Accepted: --
Published Online: Dec. 10, 2015
The Author Email: Cao Zhen (feifei4150@163.com)