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Acta Optica Sinica, Volume. 35, Issue 12, 1211003(2015)

Compensator Selection and Accuracy Analysis for Extreme Ultraviolet Lithographic Objective

Cao Zhen*, Li Yanqiu, and Sun Yuanyuan
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    Article index updated: Sep. 28, 2025

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    Cao Zhen, Li Yanqiu, Sun Yuanyuan. Compensator Selection and Accuracy Analysis for Extreme Ultraviolet Lithographic Objective[J]. Acta Optica Sinica, 2015, 35(12): 1211003

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    Paper Information

    Category: Imaging Systems

    Received: Jul. 1, 2015

    Accepted: --

    Published Online: Dec. 10, 2015

    The Author Email: Cao Zhen (feifei4150@163.com)

    DOI:10.3788/aos201535.1211003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology