Optics and Precision Engineering, Volume. 17, Issue 8, 1987(2009)
Device level vacuum packaging technologies of MEMS gyroscopes
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SHI Qin, SU Yan, QIU An-ping, ZHU Xin-hua. Device level vacuum packaging technologies of MEMS gyroscopes[J]. Optics and Precision Engineering, 2009, 17(8): 1987
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Received: Dec. 8, 2008
Accepted: --
Published Online: Oct. 28, 2009
The Author Email: SHI Qin (sqinhy@mail.njust.edu.cn)
CSTR:32186.14.
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